ppb-level gas sensor based on 2D materials
Summary Based on the mass production technique to fabricate 2D materials developed by our group, efficient gas sensors against NOx with sensitivity of 100 ppb are successfully demonstrated. In comparison to international competitors, our products exhibit superior sensitivity and selectivity. Furthermore, the technique would be extended to other 2D materials to fabricate various gas sensors against multiple target gases. The integration with internet of things would then open new feasibilities for early monitoring in environmental pollution and human safety.

For miniaturized gas sensors applied for IOT, we achieved a technique for the mass production of 2D materials. One of the significances is that we had demonstrated a highly sensitive gas sensor against NOx by SnSe2 with a minimized detection limit of 100 ppb at room temperature. Another is the two-step process including evaporated precursor followed by the plasma-assisted vapor phase reaction, which exhibits not only the wafer-scale continuous film at low temperature, but also the selective fabrications on IC. These achievements are benefit for the gas pollutant monitoring with IOT network.

Up to date, the gas sensing market shows a 5.6 % increment per year, hence the supply of efficient gas sensor with low cost is essential. Based on the successful mass production of 2D materials developed by our group, efficient gas sensors against NOx with sensitivity of 100 ppb are successfully demonstrated. Moreover, since the fabrication cost is much less than current products, multifunctional gas sensors based on 2D materials provide alternative solutions in the next generation candidate in the early monitoring in environmental pollution and human safety.
Technical Film
Keyword Electronic and optoelectronic packaging technology Interdisciplinary integration
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