半導體開發

Reliability of Cu-to-Cu direct bonging: In order to realize the reliability of Cu-to-Cu direct bonding interconnects, we adopted nanotwinned Cu (nt-Cu) electroplating process to fabricate nt-Cu microbump for Cu-to-Cu direct bonding. Figure (a) is the photo of chip after bonding. Underfill (UF) dispensing was used to protect Cu microbumps. The cross-section SEM image of Cu microbump is shown in figure (b). Some chips underwent the reliability tests, including temperature cycling test (TCT) and electromigration (EM) test. To further study the failure mechanism, finite element analysis (FEA) was done to know the stress and current distribution during reliability test. This research could provide fundamental understanding for Cu-Cu joints with organic dielectric hybrid bonding.

The DNN models of this technology include a LithoNet, an OPCNet, and a layout novelty detection network. LithoNet is a learning-based pre-simulation model for layout-to-SEM contour prediction, and OPCnet is a dual network of LithoNet for photomask optimization. Integrated with a well-trained LithoNet, our layout novelty detection network, consisting of a self-attention guided LithoNet and an autoencoder, can check if there are layout patterns easily resulting in local distortions in contours of metal lines based on multi-modal (global-local) feature fusion.

we aim to investigate advanced deep learning algorithmsintelligent human-computer interfaces (HCI) to enable a brand-new andbr / proactive questionanswering (QA) platform.

We aim to build EEG databasesapply artificial intelligence (AI) to clinical, healthcare,educational applications.

This project proposes a learning from demonstration (LfD) system that allows robots to be not only taught by human via demonstration but also adjusted by themselves.

1.Real-time monitoring of air quality in indooroutdoor environments: Sensors based on laser light scatteringelectrochemistry are used for monitoring PM2.5other air pollutants in indooroutdoor environments. The collected data from the sensors are transferred to the data center at NTU PHRC by 4G LTE. The residents can obtain the real-time air quality information through the website.2. Precision Prevention Application: an APP of CVD Risk Prediction:We developed an application for predicting CVD risk based on a Bayesian predicting model with personalized factors. With the precision risk of CVD, the health care workers can provide personalized suggestion for patients.

Many well-known celebrities in Taiwan have passed away from colorectal cancer in recent years, putting it in the spotlightraising more awareness towards detectionprevention. This type of cancer is difficult to diagnose during early stages. Often time it’s already in stage 3 when symptoms surface.

The present invention can be applied to many wearable devices. Its technologies include wireless signal transmission control systems, airbag pneumatic methods, and airbag analogue variants. Its various system controls are designed to be modularized so that users can repair and replace them.

The dialogue system is the main subsystem of the visually impaired navigation system, which provides destinations for the navigation system through multiple dialogues. We use the knowledge graph as the basis for reasoning. In terms of close-range navigation, deep learning technology is used to develop RGB camera detection depth algorithm, indoor semantic cutting algorithm, integrated detection depth estimation and indoor semantic cutting in indoor obstacle avoidance, etc. The whole system uses the CellS software design framework to integrate distributed AIoT systems.

With the rapid advancement of artificial intelligenceIoT, many solutions have been successfully implemented. However, for very large biomedical image computations, such as MRI’s, the deep learning/ training will be a lot more time consuming.

We often hear the saying that laughter is the best medicine. The insertion of humor into situations can reduce stress, help with
nerves, and even de-escalate tense situations. Have you ever imagined a time when robots would be able to be humorous and
use words to make you laugh?

This project proposes a learning from demonstration (LfD) system that allows robots to be not only taught by human via demonstration but also adjusted by themselves.

This project proposes a learning from demonstration (LfD) system that allows robots to be not only taught by human via demonstration but also adjusted by themselves.

Based on the mass production technique to fabricate 2D materials developed by our group, efficient gas sensors against NOx with sensitivity of 100 ppb are successfully demonstrated. In comparison to international competitors, our products exhibit superior sensitivity and selectivity. Furthermore, the technique would be extended to other 2D materials to fabricate various gas sensors against multiple target gases. The integration with internet of things would then open new feasibilities for early monitoring in environmental pollution and human safety.

div style="text-align: justify"Quantum key distribution exploits the transmissiondetection of single photons’ quantum states to generatedistribute secure keys, allowing absolutely secure communication. We use a self-developed miniature single-photon source, together with the single-photon wavepacket engineering, to implement a highly efficient protocol of differential-phase-shift quantum key distribution. Using the Campus Fiber Network between National Tsing Hua UniversityNational Chiao Tung University, we demonstrate Taiwan’s first outdoor quantum key distribution. The technology not only benefits the development of distance unlimited absolutely secure communication networks for the commercialmilitary uses, but also opens up new opportunities for the R&Dmarkets in industry./div

A virus NT was performed in a biosafety level 3 laboratory to determine the titers. A SARS-CoV-2 enzyme-linked immunosorbent assay (ELISA) was designed to detect neutralizing antibodies in the serum, based on the binding affinity of SARS-CoV-2 viral protein 1 and viral protein 2 to antibodies. ELISA results viral protein 1 and 2, generated comparable neutralizing antibody titers. The results analyzed by spline regression and two-variable generalized additive model precisely reflected the real NT value. Our method can serve as a surrogate to quantify neutralizing antibody titer.

AI is applied to assist data cleaning and cross-database authority control of names and institutions in the bibliographic materials such as patents, papers and research projects.

Development of AI Platform for Smart Drone - Intelligent Flight: Due to its high mobility and the ability to fly in the sky, the drone has inspired more and more innovative applications/services in recent years. The goal of this project is to resolve the problem of blindly flying an unmanned aerial vehicle (UAV, which a drone in our case) when it is out of human sight or the range of wireless communication, and three major research and development directions will be considered in this project. Three artificial intelligence (AI) technologies, namely, smart sensing, smart control, and smart simulation, are applied in this project. Smart sensing - a flight system is developed, which can avoid the obstacles, complete a flight mission, and land safely. Smart control - an intelligence flight control system and a light-weighted somatosensory vest are developed. Smart simulation - a cost-effective training system and a 3D model simplification method are designed.

1.2 kV SiC Super Junction MOSFET: We have developed the first 1.2 kV SJ MOSFET in Taiwan in 2020. Its threshold voltage is 3.5 V, saturation current is about 12 A, and the specific on resistance is 8mΩ*cm2.

Electroplated nanotwinned Cu possesses excellent electrical & mechanical properties. It can be applied in three major joints:1. Low thermal budget/ low resistance Cu bonding for high performance computing chip.We are able to achieve low temperature bondinginstant bonding. Low temperature bonding is performed at 150°C for 1 h to achieve low contact resistance copper bonding. Instant bonding is performed at 300°C for 5 seconds under a pressure of 90MPa achieve low contact resistance.2. High strength/ High ductility copper lines in 3D-IC packaging We are able to fabricate high strength foils with tensile strength of 800MPa. After annealing at 150°C for 3 hours, the foil retains a tensile strength of 750MPa. 3. Cu foils for lithium ion battery

The technology designs a modular friction stir welding tool holder. This welding tool holder integrates a variety of functions, including constant pressure welding, temperature monitoring, removable FSW tool design, and can be clamped to an existing CNCmachine. The advantage is that it can realize the function of automatic exchange for friction stir welding and CNC milling in one machine. Breaking through the previous friction stir welding, you need to buy a friction stir welding machine, which is expensive to obtain.

The invention belongs to the field of low-temperature electrochemical graphitization and is improved by the FFC-Cambridge Process. In comparison to the traditional process, the invention can be at a low temperature of 850oC and shorter process time. This strategy can convert carbon blacks into high-value graphite (graphene). The method is simple, low temperature, without adding catalyzer, and low-cost. The products have a wide range of applications such as energy storage, catalysis, absorption, separation, processing metal cutter, precision die, aeronautics, and astronautics.

With the rapid advancement of artificial intelligence and IoT, many solutions have been successfully implemented. However, for very large biomedical image computations, such as MRI’s, the deep learning/ training will be a lot more time consuming. At the moment, GPU’s are considered the baby of the AI world, Google has also developed a TPU to expedite AI procedures. Both GPU and TPU make the process swift. Prof. Darsen Lu’s Research Team has built an open simulation platform called (simNemo) to enable design exploration by academic and industry users in Taiwan on both the AI platform and AI application fronts.

With the rapid advancement of artificial intelligence and IoT, many solutions have been successfully implemented. However, for very large biomedical image computations, such as MRI’s, the deep learning/ training will be a lot more time consuming. At the moment, GPU’s are considered the baby of the AI world, Google has also developed a TPU to expedite AI procedures. Both GPU and TPU make the process swift. Prof. Darsen Lu’s Research Team has built an open simulation platform called (simNemo) to enable design exploration by academic and industry users in Taiwan on both the AI platform and AI application fronts.

With the rapid advancement of artificial intelligenceIoT, many solutions have been successfully implemented. However, for very large biomedical image computations, such as MRI’s, the deep learning/ training will be a lot more time consuming.

We present pen-probe analyzers based on ion-mobility spectrometry and mass spectrometry for in-situ detection of volatile organic compounds (VOCs) or mapping of VOCs emanating from surfaces. User approaches probe to the analyzed object, and presses a button on the probe. The collected data are uploaded to the Internet cloud for retrieval and processing. Every data file contains the exact time and geographical co-ordinates of sample collection site. In another embodiment, the pen-shaped probe has been robotized to enable open-space sampling and mapping of VOCs emanating from solid specimens.

In response to the global COVID-19 pandemic, Prof. Jinn-Moon Yang, the director of the Department of Biological Science & Technology at the National Yang Ming Chiao Tung University (NYCU),also leading an AI project as a principal investigator within MOST Joint Research Center for AI TechnologyAll Vista Healthcare (AINTU), created an intercollegiateinterdisciplinary smart dynamic system-based biologicalmedicine development team.

Summary Description： 1. Stress alters mitochondrial import of proteins. To monitor changes in mitochondrial import at single-mitochondrial resolution, split GFP epitopes are fused to the target proteins and mitochondrial membranes or expressed in the mitochondrial matrix. 2. General genotoxic agents damage both nuclear and mitochondrial DNA. By expressing mitochondrial DNA binding protein TFAM fused with KillerRed, specific mitochondrial DNA damages by light exposure are induced for investigating mitochondrial DNA damage signal. 3. Quantification of four dNTP pools is important for understanding drug action. The popularity of the analysis has been limited by the requirement of radio-isotope or sophisticated instrumentation. The method of click reaction we designed for measuring dNTPs overcomes the drawbacks of conventional methods. 4. The outbreak of drug-resistant Candida infection in hospital is of concern. We found the distinct biochemical property of Candida TMPK in high affinity to uridylate as the substrate, leading to the discovery of 5FUd (＜5 nM) in suppressing Candida growth.

Through the technique, Sampling and Prediction of Lithography Overlay Errors, the cost and time of overlay error measurement can be reduced to improve the process efficiency. We identify key sampling through clustering and machine learning models, and design a new sampling algorithm in photolithography process. Due to the complexity of wafer and many training factors of wafer data, we combine the clustering algorithm with incremental learning to meet customers＇ unique needs and achieve the goal of optimally sampling and reducing the costs.

div style="text-align: justify"Quantum key distribution exploits the transmissiondetection of single photons’ quantum states to generatedistribute secure keys, allowing absolutely secure communication. We use a self-developed miniature single-photon source, together with the single-photon wavepacket engineering, to implement a highly efficient protocol of differential-phase-shift quantum key distribution. Using the Campus Fiber Network between National Tsing Hua UniversityNational Chiao Tung University, we demonstrate Taiwan’s first outdoor quantum key distribution. The technology not only benefits the development of distance unlimited absolutely secure communication networks for the commercialmilitary uses, but also opens up new opportunities for the R&Dmarkets in industry./div